Integrated helix coil inductor on silicon

ABSTRACT

A new structure and method is provided for the creation of an inductor on the surface of a silicon semiconductor substrate. The inductor is of a helix coil design having upper level and lower level conductors further having an axis whereby the axis of the helix coil of the inductor is parallel to the plane of the underlying substrate. Under the first embodiment of the invention, the height of the helix coil that is created on the surface of a silicon substrate is uniform. Under the second embodiment of the invention the height of the helix coil of the inductor of the invention is uniform while a ferromagnetic core is inserted between the upper and the lower level conductors of the helix coil. Under the third embodiment of the invention, the height of the helix coil that is created on the surface of a silicon substrate is non-uniform. Under the fourth embodiment of the invention the height of the helix coil of the inductor of the invention is non-uniform while a ferromagnetic core is inserted between the upper and the lower level conductors of the helix coil.

BACKGROUND OF THE INVENTION

[0001] (1) Field of the Invention

[0002] The invention relates to the fabrication of integrated circuitdevices, and more particularly, to a method and structure for creating ahigh Q helix coil inductor that can readily be created for ComplementaryMetal Oxide Semiconductors (CMOS) for both Very Large Scale Integration(VLSI) and Ultra Large Scale Integration (ULSI) technologies.

[0003] (2) Description of the Prior Art

[0004] Modern semiconductor technology requires the creation of highperformance semiconductor devices that are produced at competitiveprices. A direct result of these requirements is that device density andinter-device packaging density continue to increase from which directlyfollows the requirement that the surface area or space that is availableon the surface of a semiconductor substrate is carefully allocated andmaximized in its use.

[0005] While the majority of semiconductor devices relate to the fieldof digital data processing, electronic circuitry can nevertheless bedivided into two broad fields. One field addresses digital processingwhile the second field addresses the manipulation of analog signals.Digital semiconductor devices have as function the manipulation andstorage of digital information. The functions of analog electroniccircuitry have in previous years typically been handled by separatecomponents such as relatively large capacitors or relatively largeinductors. The separate components may have been applied in combinationwith digital processing capabilities, whereby however a significantportion of the functional implementation has been realized by the use offor instance capacitive and inductive components in addition to andfunctionally collaborating with the digital components. Circuitrequirements that are imposed on components that are required for analogprocessing have in the past limited the integration of such componentsinto typical semiconductor integrated circuit devices.

[0006] Modern mobile communication applications center around compacthigh-frequency equipment. With the continued improvements in theperformance characteristics of this equipment, continued emphasis willbe placed on small size of the equipment, low power consumption,increased frequency applications and low noise levels. Semiconductordevices are used in the field of mobile communication for the creationof Radio Frequency (RF) amplifiers. A major component of a typical RFamplifier is a tuned circuit that contains inductive and capacitivecomponents. The tuned circuit has as electrical characteristic that,dependent on and determined by the values of its inductive andcapacitive components, can form an impedance that is frequencydependent, which enables the tuned circuit to either form a high or alow impedance for signals of a certain frequency. In this manner thetuned circuit can either reject or pass and further amplify componentsof an analog signal based on the frequency of that component. The tunedcircuit can therefore be used as a filter to filter out or removesignals of certain frequencies or to remove noise from a circuitconfiguration that is aimed at manipulating analog signals. The tunedcircuit can also be used to form a high electrical impedance by usingthe LC resonance of the circuit and to thereby counteract the effect ofparasitic capacitances that are part of a circuit. The self-resonancethat is caused by the parasitic capacitance between the (spiral)inductor and the underlying substrate will limit the use of the inductorat high frequencies.

[0007] One of the key components that is applied in creating highfrequency analog semiconductor devices is the inductor that forms partof a LC resonance circuit. The key challenge in the creation of theinductor is to minimize the surface area that is required for thecreation of the inductor while maintaining a high Q value for theinductor. Conventional inductors that are created on the surface of asubstrate are of a spiral shape, whereby the spiral is created in aplane that is parallel with the plane of the surface of the substrate.Conventional methods that are used to create the inductor on the surfaceof a substrate suffer several limitations. Most high Q inductors formpart of a hybrid device configuration or of Monolithic MicrowaveIntegrated Circuits (MMIC's) or are created as discrete components, thecreation of which is not readily integratable into a typical process ofIntegrated Circuit manufacturing.

[0008] By combining the creation on one semiconductor monolithicsubstrate of circuitry that is aimed at the function of analog datamanipulation and analog data storage with the functions of digital datamanipulation and digital data storage, a number of significantadvantages are achieved. Such advantages include the reduction ofmanufacturing costs and the reduction of power consumption by thecombined functions. To reach required inductive values for particularapplications, inductors can be of significant physical size and cantherefore require a significant surface area of the semiconductorsubstrate. To limit this impact of space requirement, inductors aretypically formed on the surface of a substrate in a spiral form. Thespiral form of the inductor however results in parasitic capacitancesbetween the inductor wiring and the underlying substrate, due to thephysical size of the inductor. These parasitic capacitances have aserious negative effect on the functionality of the created LC circuitby sharply reducing resonance frequency of the tuned circuit of theapplication.

[0009] Widely used in the industry to describe the applicability of acreated inductor is the Quality (Q) factor of the inductor. The qualityfactor Q of an inductor is defined as follows: Q=Es/El wherein Es is theenergy that is stored in the reactive portion of the component while Elis the energy that is lost in the reactive portion of the component. Thehigher the quality of the component, the closer the resistive value ofthe component approaches zero while the Q factor of the componentapproaches infinity. The quality factor for components differs from thequality that is associated with filters or resonators. For components,the quality factor serves as a measure of the purity of the reactance(or the susceptance) of the component, which can be degraded due toparasitics. In an actual configuration, there are always some physicalresistors that will dissipate power, thereby decreasing the power thatcan be recovered. The quality factor Q is dimensionless. A Q value ofgreater than 100 is considered very high for discrete inductors that aremounted on the surface of Printed Circuit Boards. For inductors thatform part of an integrated circuit, the Q value is typically in therange between about 3 and 10.

[0010] In creating an inductor on a monolithic substrate on whichadditional semiconductor devices are created, the parasitic capacitancesthat occur as part of this creation limit to less than 5 the qualityfactor that can be achieved for the inductor using the conventionalsilicon process. This limitation is, for many applications, notacceptable. Dependent on the frequency at which the LC circuit isdesigned to resonate, significantly larger values of quality factor,such as for instance 100 or more, must be available. Prior Art has inthis been limited to creating values of higher quality factors asseparate units, and in integrating these separate units with thesurrounding device functions. This negates the advantages that can beobtained when using the monolithic construction of creating both theinductor and the surrounding devices on one and the same semiconductorsubstrate. The non-monolithic approach also has the disadvantage thatadditional wiring is required to interconnect the sub-components of theassembly, thereby again introducing additional parasitic capacitancesand resistive losses over the interconnecting wiring network. For manyof the applications of the RF amplifier, such as portable batterypowered applications, power consumption is at a premium and musttherefore be as low as possible. By raising the power consumption, theeffects of parasitic capacitances and resistive power loss can bepartially compensated but there are limitations to even this approach.These problems take on even greater urgency with the rapid expansion ofwireless applications such as portable telephones and the like. Wirelesscommunications is a rapidly expanding market, where the integration ofRF integrated circuits is one of the most important challenges. One ofthe approaches is to significantly increase the frequency of operationto for instance the range of 10 to 100 GHz. For such high frequencies,the values of the quality factor obtained from silicon-based inductorsare significantly degraded. For applications in this frequency range,monolithic inductors have been researched using other than silicon asthe base for the creation of the inductors. Such monolithic inductorshave for instance been created using sapphire or GaAs as a base. Theseinductors have a considerably lower parasitic capacitance than theirsilicon counterparts and therefore provide higher resonance frequency ofthe LC circuit. Where however more complex applications are required,the need still exists to create inductors using silicon as a substrate.For those applications, the approach of using a base material other thansilicon has proven to be too cumbersome while for instance GaAs as amedium for the creation of semiconductor devices is as yet a technicalchallenge that needs to be addressed.

[0011] The incorporation of RF inductors without sacrificing deviceperformance due to substrate losses has been extensively researched inrecent years. Some of the techniques that have been used for thisapproach include:

[0012] the selective removing (by etching) of the silicon underneath theinductor (using methods of micro-machining) thereby removing substrateparasitic effects

[0013] using multiple layers of metal (such as aluminum) interconnectsor of copper damascene interconnects using a high resistivity siliconsubstrate thereby reducing resistive losses in the silicon substrate,since resistive substrate losses form a dominant factor in determiningthe Q value of silicon inductors

[0014] using metals that are particularly adaptable to the process ofthe formation of inductors, a concern is thereby however raised by theuse of AlCu (a metal that is frequently used in semiconductormetallization) since AlCu has higher resistivity than gold (Au)metallization that is frequently used in GaAs technology

[0015] employing biased wells underneath a spiral conductor

[0016] inserting various types of patterned ground shields between thespiral inductor and the silicon substrate, and

[0017] creating an active inductive component that simulates theelectrical properties of an inductor as it is applied in activecircuitry; this approach however results in high power consumption bythe inductor and in noise performance that is unacceptable for lowpower, high frequency applications.

[0018] The above listing of researched alternatives is not meant to becomplete or all inconclusive. The above approaches have as commonobjectives to:

[0019] 1) enhance the quality (Q) value of the inductor

[0020] 2) increase the frequency of the LC self-resonance therebyincreasing the frequency range over which the inductor can be used, and

[0021] 3) reduce the surface area that is required for the creation ofthe inductor.

[0022] The inductor of the invention addresses the objectives that havebeen listed above and provides a method for creating an inductor thatcan readily be integrated in a manufacturing process for the creation ofVLSI and ULSI CMOS devices. The method of the invention creates a helixcoil inductor, which has an improved Q factor when compared with the Qfactor of a typical spiral inductor, that is created in a plane that isparallel with the surface of the substrate.

[0023]FIG. 1a shows a top view of a Prior Art horizontal spiral inductor25. Some of the design parameters of conductor 25 are highlighted asfollows:

[0024]10 is the body of the inductor and contains a conductive material

[0025]11 is one extremity of the conductive body 10 of the inductor 25and is, for convenience sake and arbitrarily, referred to as thebeginning of the conductive body 10 of the inductor 25

[0026]12 is a conductive connector that connects to the beginning 11 ofthe conductive body 10 of the inductor 25

[0027]13 is the opposing extremity of the conductive body 10 of theinductor 25 and will be referred to as the end of the conductive body ofthe inductor 25

[0028]14 is a contact via that interconnects metal strip 12 with theconductive body 10 of the inductor 25

[0029]16 is the spacing,between the spirals of the conductive body 10 ofinductor 25

[0030]18 is the width of the spirals of the conductive body 10 ofinductor 25

[0031]20 is the length of the longest spiral of the conductive body 10of inductor 25, and

[0032]22 is the length of the inner opening of the conductive body 10 ofinductor 25.

[0033] The top view of the Prior Art inductor that is shown in FIG. 1 isnot shown in order to highlight in extensive detail all the parametersthat can be associated with such an inductor but merely serves to pointout the essence of the Prior Art inductor, that is:

[0034] the geometric shape of the inductor is that of a spiral

[0035] the individual sections that make up the spiral of the inductoralternately intersect at an angle of 90 degrees and have a length and awidth and are separated by a spacing

[0036] the spiral that forms the inductor ends in two extremities, theinductor is electrically interconnected to surrounding circuitry bybeing connected to these two extremities, and

[0037] the body of the inductor is contained in a plane that is parallelto the plane of the surface of the substrate on which the inductor iscreated.

[0038] Not shown in FIG. 1 is the height of each of the linear segmentsthat collectively form the body of the inductor 10, this height can bedefined as the thickness of the conductive layer that is deposited onthe surface of the substrate for the formation of the inductor. Thelower surface of the inductor is the surface of the inductor that isparallel to the surface of the substrate and that is closest to thesurface of the substrate, the upper surface of the inductor is thesurface of the inductor that is parallel to the surface of the substrateand that is furthest removed from the surface of the substrate. Thedistance between the upper surface and the lower surface of the inductoras measured in a direction that is perpendicular to the plane of thesubstrate is the height of the inductor. A cross section of the inductorthat is taken in a plane between the upper and the lower surface of theinductor shows the geometric shape of the inductor, which is the shapeof a spiral. The height of the inductor of Prior Art is essentially thesame along the spiral of the inductor.

[0039] U.S. Pat. No. 5,936,298 (Capocelli) teaches a Helix coil. Thepatent does not appear to claim a wider center radius.

[0040] U.S. Pat. No. 5,576,680 (Ling) shows helix coil with a core.

[0041] U.S. Pat. No. 5,884,990 (Burghartz et al.), U.S. Pat. No.6,008,102 (Alford et al.), U.S. Pat. No. 5,831,331 (Lee) and U.S. Pat.No. 3,614,5,54 (Shield) show various coils helix coils and cores.

SUMMARY OF THE INVENTION

[0042] A principle objective of the invention is to create an inductoron the surface of a silicon substrate that has improved Q factor whencompared with the spiral inductor of conventional design.

[0043] Another objective of the invention is to create an inductor onthe surface of a silicon substrate that provides higher inductive valueswhen compared with the spiral inductor of conventional design.

[0044] Another objective of the invention is to create an inductor onthe surface of a silicon substrate that requires a smaller siliconsurface area for its implementation when compared with the spiralinductor of conventional design.

[0045] Another objective of the invention is to create an inductor onthe surface of a silicon substrate that extends and maintains itscharacteristics of improved Q factor and higher inductive values and asmaller silicon surface area for its implementation in higher frequencyapplications when compared with the spiral inductor of conventionaldesign in higher frequency applications.

[0046] In accordance with the objectives of the invention a newstructure is provided for the creation of an inductor on the surface ofa silicon semiconductor substrate. The inductor is of helix coil,whereby the plane of a cross section of the inductor that reflects thehelix coil design of the inductor is parallel to the plane of theunderlying substrate. Under the first embodiment of the invention, theheight of the helix coil that is created on the surface of a siliconsubstrate is uniform. Under the second embodiment of the invention theheight of the helix coil of the inductor of the invention is alsouniform but a ferromagnetic core is inserted between the upper and thelower conductors of the helix coil. Under the third embodiment of theinvention, the height of the helix coil that is created on the surfaceof a silicon substrate is non-uniform. Under the fourth embodiment ofthe invention the height of the helix coil of the inductor of theinvention is non-uniform while a ferromagnetic core is inserted betweenthe upper and the lower conductors of the helix coil.

BRIEF DESCRIPTION OF THE DRAWINGS

[0047]FIG. 1 shows a top view of a Prior Art horizontal spiralconductor.

[0048]FIG. 2 addresses the helix coil inductor of the first embodimentof the invention that uses uniform vertical interconnect conductorheight, as follow:

[0049]FIG. 2a is an extended three-dimensional view of the helix coilinductor of the invention with a uniform vertical interconnect conductorheight.

[0050]FIG. 2b shows an X-X′ cross section of the helix coil inductor ofthe invention with a uniform vertical interconnect conductor height.

[0051]FIG. 2c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a uniform vertical interconnect conductor height.

[0052]FIG. 2d shows a top view of the helix coil inductor of theinvention with a uniform vertical interconnect conductor height.

[0053]FIG. 2e shows a top view of the geometric centers of a sampling oftop level conductors of the helix coil of the invention.

[0054]FIG. 2f shows a top view of the geometric centers of a sampling ofbottom level conductors of the helix coil of the invention.

[0055]FIG. 3 addresses the helix coil inductor of the second embodimentof the invention that uses uniform conductor height whereby furthermoreferromagnetic material is incorporated, as follow:

[0056]FIG. 3a is an extended three-dimensional view of the helix coilinductor of the invention with a uniform vertical interconnect conductorheight whereby ferromagnetic material is incorporated.

[0057]FIG. 3b shows an X-X′ cross section of the helix coil inductor ofthe invention with a uniform vertical interconnect conductor heightwhereby ferromagnetic material is incorporated.

[0058]FIG. 3c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a uniform vertical interconnect conductor heightwhereby ferromagnetic material is incorporated.

[0059]FIG. 3d shows a top view of the helix coil inductor of theinvention with a uniform vertical interconnect conductor height wherebyferromagnetic material is incorporated.

[0060]FIG. 4 addresses the helix coil inductor of the third embodimentof the invention that uses non-uniform vertical interconnect conductorheight, as follow:

[0061]FIG. 4a is an extended three-dimensional view of the helix coilinductor of the invention with a non-uniform vertical interconnectconductor height.

[0062]FIG. 4b shows an X-X′ cross section of the helix coil inductor ofthe invention with a non-uniform vertical interconnect conductor height.

[0063]FIG. 4c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a non-uniform vertical interconnect conductor height.

[0064]FIG. 5 addresses the helix coil inductor of the fourth embodimentof the invention that uses non-uniform vertical interconnect conductorheight whereby ferromagnetic material is incorporated, as follow:

[0065]FIG. 5a is an extended three-dimensional view of the helix coilinductor of the invention with a non-uniform vertical interconnectconductor height whereby ferromagnetic material is incorporated.

[0066]FIG. 5b shows an X-X′ cross section of the helix coil inductor ofthe invention with a non-uniform vertical interconnect conductor heightwhereby ferromagnetic material is incorporated.

[0067]FIG. 5c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a non-uniform vertical interconnect conductor heightwhereby ferromagnetic material is incorporated.

[0068]FIG. 6 shows a graphic depiction of the Q factor as a function offrequency for a conventional spiral inductor and for the helix coilinductor of the invention.

[0069]FIG. 7 shows a graphic depiction of the Q factor as a function offrequency for the spiral inductor of the invention with and without theincorporation of ferromagnetic material in the helix coil inductor.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0070] The structure of the invention will be highlighted byconcentrating on the geometric and structural details of the creation ofthe inductor of the invention. Processing conditions that are requiredto implement these structural details will not be highlighted forreasons of simplicity. Among these processing steps are steps ofdepositing layers of dielectric and the patterning and etching ofopenings in these layers of dielectric whereby these openings arealigned with underlying patterns. To include these processing steps inthe description of the inventions would require the entry of conditionsof deposition, patterning and etching that would make the currentdocument unnecessarily cumbersome.

[0071] The key concept and key reason that causes the design of helixcoil inductor to provide significantly improved performance as aninductor, improvements that have already been highlighted under theobjective of the invention, will be indicated following. In theconventional design of an inductor that is created on the surface of asilicon substrate, a design that is presented in FIG. 1, theelectromagnetic field of the inductor penetrates the surface of theunderlying silicon substrate due to its location and construction. Thispenetration of the magnetic field of the inductor into the underlyingsilicon substrate causes significant resistive losses that restrict orreduce the Q value that can be obtained for the inductor of conventionaldesign. The design of the invention, which uses a helix coil forgeometry for the body of the inductor, provides an inductor that has awider coil radius at the center of the coil which maximizes theintensity of the electromagnetic field in that area. In addition, theelectromagnetic field of the invention is essentially horizontal andabove the surface of the substrate, which significantly reduced theresistive losses that are incurred by the inductor in the surface of theinductor. The increased strength of the electromagnetic field at thecenter of the body of the inductor combined with the horizontalorientation of the electromagnetic field of the inductor leads toincreased inductive value of the component and increased Q value of theinductor.

[0072] In view of the above, and considering that current trends in thesemiconductor industry are gravitating towards increased use ofhigh-performance broadband RF applications combined with the convergenceof computer, consumer and communication based technologies, it isexpected that the inductor of the invention will exert a significantinfluence on current broadband designs and applications. In addition,for the era of deep-submicron processes combined with the use of copperfor interconnect lines, the inductor of the invention provides forsignificant improvements in the Q factor of the inductor while higherinductive values can be obtained at reduced surface areas that arerequired for the creation of the inductor, all these advances andadvantages remaining valid at high frequencies of applications.

[0073]FIG. 2 addresses a helix coil inductor of the first embodiment ofthe invention that uses uniform conductor height, as follow:

[0074]FIG. 2a is an extended three-dimensional view of the helix coilinductor of the invention with a uniform conductor height.

[0075] In order to facilitate the following discussions, the familiarconcept of three-dimensional Cartesian coordinates is briefly discussedwith an emphasis on how these coordinates will be used for the subjectdiscussion. The Cartesian coordinates as used herein have three axis,the X, Y and Z axis whereby the angle between each of the three axis andthe other two axis is 90 degrees. The X and Y axis are in a plane thatis parallel with the surface of the substrate on which the inductor willbe formed, the Z axis is therefore perpendicular to the plane of thesubstrate. The three axis of the Cartesian coordinates intersect in onepoint, which is considered the geometric center of the Cartesiancoordinates.

[0076] Referring now specifically to FIG. 2a, there is shown a threedimensional expanded view of the helix coil inductor of the inventionwhereby the height of the inductor is uniform in a plane that isparallel to the plane of the surface of the substrate on which theinductor is created. The helix coil of the inductor has bottom levelconductors and upper level conductors, both the bottom level conductorsand the upper level conductors run parallel to the plane of the surfaceof the underlying silicon substrate. The lower level conductors areconnected to the upper level conductors by means of conductorinterconnects that run in the Z direction of the helix inductor. Thehelix coil of the inductor of the invention has a lower surface and anupper surface. The lower surface of the helix coil is the surface of thehelix coil that is closest to the surface of the underlying substratewhereby the lower surface of the helix coil coincides with the lowersurface of the lower level conductors of the helix coil. The uppersurface of the helix coil is the surface of the helix coil that isfurthest removed from the surface of the underlying substrate wherebythe upper surface of the helix coil coincides with the upper surface ofthe upper conductors of the helix coil.

[0077] The Cartesian X and Y coordinates are indicated in FIG. 2a, thethird coordinate Z is perpendicular to the plane that contains the X andY axis whereby the latter plane is parallel to the plane of the surfaceof the substrate. It is clear from the three dimensional view that isshown in FIG. 2a, that the helix coil is widest at the center of theconductor along the Y-axis and at the point where the X and Y-axisintersect. From this point of maximum width and proceeding in eitherdirection along the X-axis, the Y parameter of the maximum extension ofthe successive upper and lower level conductors that form the helix coilhave progressively smaller values. It is further clear that the upperconductors of the helix coil intersect the X-axis under an angle that is90 degrees while the lower level conductors intersect the X-axis underan angle that is not 90 degrees but have an angle of intersect with theX-axis without which a helix coil cannot be a helix coil. One furtherobservation is in order relative to the perspective view of the helixcoil that is shown in FIG. 2a: the height of the vertical interconnectsbetween the upper and the lower level conductors of the helix coil isuniform. It is important to highlight this at this time because one ofthe embodiments of the invention provides a design where this is not thecase.

[0078] In FIG. 2a, one of the upper conductors has been highlighted asconductor 28, one of the lower level inductors has been highlighted asinductor 26, one vertical conductor interconnect has been highlighted as30 while the two input/output connectors to the helix coil of theinductor have been highlighted as 22 and 24. It is further clear fromthe view of the helix coil of the invention that the upper level (28)and lower level (26) conductors have a cross section that is a geometricrectangle while the vertical interconnect conductors (30) have a crosssection that is a circle.

[0079] A helix coil typically has an axis, the axis of the helix coilthat is shown in FIG. 2a is parallel with the plane of the underlyingsemiconductor substrate (not shown in FIG. 1) and runs parallel with theX-X′ axis. This axis of the helix coil will typically run through themiddle of the coil in the direction X-X′ shown in FIG. 2a and in a planethat contains the X-X′ axis and is perpendicular to the surface of theunderlying substrate and between the upper conductors and the lowerconductors at a height above the upper surface of the lower levelconductors that is equal to half the height of the vertical interconnectconductors.

[0080] The process of creating the helix coil conductor of the inventionuses the following steps. The lower level conductors 26 are firstformed, these conductors may be formed on top of a layer of dielectricthat has been deposited on the surface of the underlying substrate orthey may be formed directly on the surface of the substrate. These lowerlevel conductors 26 are formed under a relatively small angle with theY-Y′ axis, an angle of between about 5 and 30 degrees. After the lowerlevel conductors have been formed, dielectric is deposited over thesurface of the lower level of conductors to a height that is thecombined value of the height of the vertical interconnects 30 and thethickness of the upper level conductors 28. The conventional dualdamascene process then allows for the creation of the verticalinterconnects 30 at the same time that the upper level of conductors 28are created. After this dual damascene process has been completed, thenow completed helix coil of the invention can be covered with apassivation layer to protect the coil from environmentally induceddamage. In performing the dual damascene process, it must be noted thatthe input and output connections 22/24 for the helix coil are to besimultaneously created thus providing the means of accessing the helixcoil.

[0081] Proceeding to FIG. 2b, there is shown an X-X′ cross section ofthe helix coil inductor of the invention with a uniform conductorheight. The cross section that is shown in FIG. 2b is taken along theX-X′ axis (as if sawing the coil in half along the line of the X-axisthat is shown in FIG. 2a and looking at one or the other of the sawedoff surfaces) and therefore does not indicate the variation in lengthsthat exists between successive and adjacent upper and lower levelconductors that form the helix coil of the inductor.

[0082] Highlighted in FIG. 2b is one of the upper level conductors 28,one of the lower level conductors 26 and one of the verticalinterconnects 30 between the upper and lower level conductors. It isunderstood in FIG. 2b that all cross sections of identical geometry thatare shown at the same level as cross section 28 are (the other) upperconductors, correspondingly for the lower level conductors 26 and thevertical interconnects 30 of the helix coil.

[0083] Further shown in the cross section that is shown in FIG. 2b isthe silicon substrate 05 on the surface of which the helix coil of theinvention is created. The helix coil of the invention is created in alayer 32 of dielectric that can contain for instance oxide. Over thesurface of layer 32 of dielectric a passivation layer 34 is depositedfor the protection and shielding of the helix coil of the invention.

[0084]FIG. 2c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a uniform conductor height. The previously identifiedupper and lower level conductors of the helix coil are highlighted inFIG. 2c together with one vertical interconnect between the lower andthe upper level conductors. Further highlighted are items 36, 38 and 40,which represent respectively the collective ends of the lower levelconductors 26, the collective vertical interconnects 30 and thecollective ends of the upper conductors 28 of the helix coil whenlooking at this coil from the Y-Y′ cross cut. For reasons of simplicitythese collective items have been highlighted only once whereby it isunderstood that the totality of 36, 38 and 40 is represented by equalcross sections that are shown in FIG. 2c of the same geometricconfiguration and at the same (horizontal) level as where 36, 38 and 40have been highlighted.

[0085]FIG. 2d shows a top view of the helix coil inductor of theinvention with a uniform conductor height. In FIG. 2d only one upperconductor (28) and one lower level conductor (26) have been crosshatched (limited to only one for reasons of clarity of the top view thatis shown), three vertical interconnects 30 that interconnect thehighlighted upper and the lower level conductors (to each other) and tothe immediately adjacent conductors have also been highlighted.

[0086] The graphic displays that are shown in FIGS. 2e and 2 f arepresented to facilitate later explanations of the structure of the helixcoil of the invention. The lines shown in each of these two figures areimaginary center lines that are defined as existing between thesidewalls of the upper level and lower level conductors and that run inthe direction of length of these conductors. As such it is convenient torefer to these lines as the lengthwise geometric center lines or simplythe geometric centers of the conductors. These geometric center linescan exist in either the upper of the lower surface of either the upperlevel or lower level conductors of the helix coil of the invention. Itis thereby preferred to refer to the geometric center of the lowersurface of an upper level conductor and the geometric center of theupper surface of a lower level conductor. The reason for this is thatthese two surfaces face each other and that the vertical interconnectmake contact with these surfaces.

[0087]FIG. 2e shows a top view of the geometric centers of a sampling oftop level conductors 28 of the helix coil of the invention. It isnoteworthy that the geometric centers of the upper level conductorsintersect the X-X′ axis under an angle of 90 degrees, that the longestof the upper level conductors, that is line 61′ has a point y+ max. anda point y− max. These points are the points where the geometric centerof the vertical interconnect conductors 30 overlays respectively thelower surface of the upper level conductor (28) and the upper surface ofthe lower level conductor (26). Since the cross section of the verticalinterconnect conductor is a circle, the geometric center of the crosssection of the vertical interconnect conductors is the line thatconnects two geometric centers of two different cross sections of avertical interconnect conductor. Further to be noted from FIG. 2e isthat the geometric centers of the upper level conductors are parallel,that the upper level conductors are of reduced length for conductorsthat are further removed from the longest upper level conductor and thatthe upper level conductors extend from their intersect with the X-X′axis over equal length at both sides of this intersect.

[0088] To specifically highlight some of the design aspects of the helixcoil, further detail has been shown for one selected upper levelconductor 37′. The line 29′ as shown represents the geometric center ofthe upper level conductor 37′, with end points 33′ and 33″. The circularcross sections of the vertical interconnects that make contact with thelower surface of the upper level conductor 37′ are highlighted as thecircles 35′, the center of these circles 35′ is the geometric center ofthe vertical interconnects while 31′ are the two lines that representthe sidewalls of the upper level conductor 37′. The points 41′ and 41″are endpoints of geometric centers of lines that are adjacent to line37′ that are used in the description under FIG. 2f.

[0089]FIG. 2f shows a top view of the geometric centers of a sampling ofbottom level conductors of the helix coil of the invention. The lowerlevel conductors contain two conductors 60′ and 60″ of maximum lengthwhose geometric centers intersect the Y-Y′ axis at the two points y+max.and y−max. These latter two points are the two points where the verticalinterconnects for these lower level conductors 60′ and 60″ are the samevertical interconnect as the vertical interconnects that are connectedto the maximum length upper level conductor 61′. These two points are,in other words, the two points where the maximum width of the upperlevel conductors matches up with the maximum width of the lower levelconductors. Further noteworthy in FIG. 2f is that the lower levelconductors are not parallel and intersect the X-X′ axis under an anglethat is not constant, that the lower level conductors are of reducedlengths for conductors that are further removed from the two longestlower level conductors 60′ and 60″ and that the lower level conductorsextend from their intersect with the X-X′ axis over a distance that isnot equal in length at both sides of this intersect. The angle betweenthe direction of the Y-Y′ axis and the direction of the lower levelconductors is the same for the lowest level conductors 60′ and 60″maximum and equal length, this angle increases for lines of geometriccenters that are further removed from these lines of geometric centers60′ and 60″. For pairs of lines of geometric centers that surround lines60 and 60″, these angles are the same, for instance for lines 43′ and61′, the angle between the direction of this line and the direction ofthe Y-Y′ axis is the same, as is the case for lines 62′ and 45′.

[0090] Further shown in FIG. 2f are two lower level conductors 47′ and49′ that interconnect with the upper level conductor 37′ of FIG. 2e.This is highlighted by making the end points of the geometric centers43′ (between points 33″ and 41″) and 45′ (between point 41′ and 33′) oflower level conductors 47′ and 49′ the same points 33′ and 33″ that havebeen shown in FIG. 2e. The sidewalls for lower level conductor 47′ havebeen marked with 51′, the sidewalls for lower level conductor 49′ havebeen marked with 53′. The dotted lines that are shown in FIG. 2f are thegeometric centers of the upper level conductors that have previouslybeen shown in FIG. 2e, including the dotted section of the Y-Y′ axiswhich is the upper level connector of maximum length 61′ if FIG. 2e.

[0091] It must further be noted in FIG. 2f that lines of geometriccenters of the lower level conductors that are located on both sides ofthe longest lines 60′ and 60″ are in pairs of equal length where themembers of each pair are located on opposite sides of lines 60′ and 60″.For instance, the length of line 61′ is equal to the length of line 43′,the length of line 62′ is equal to the length of line 45′. This patternwould continue for a pattern of lines that contains more line than thesample pattern that has been shown in FIGS. 2e and 2 f.

[0092]FIG. 3 addresses a helix coil inductor of the invention that usesuniform conductor height whereby furthermore ferromagnetic material 42is incorporated. The construction of the helix coil of the inventionthat is shown in the FIGS. 3a through 3 d is identical to theconstruction of the helix coil of the invention that has been shown inFIGS. 2a through 2 d with the major and significant difference that aferromagnetic core 42 has been incorporated between the upper and thelower level inductors of the helix coil. The comments and highlightedfeatures that apply to the respective drawings are therefore equallyapplicable between for instance FIG. 2a and FIG. 3a, FIG. 3b and FIG.3b, etc. with the notable exception that each of the FIG. 3a through 3 dshows the incorporation of the ferromagnetic core 42.

[0093]FIG. 3a is an extended three-dimensional view of the helix coilinductor of the invention with a uniform conductor height wherebyferromagnetic material 42 is incorporated.

[0094] The method to form the helix coil of the invention that has beensupplied with ferromagnetic material between the upper and lower levelconductors of the coil is as follows. The process of creating the helixcoil conductor of the invention uses the following steps. The lowerlevel conductors 26 are first formed, these conductors may be formed ontop of a layer of dielectric that has been deposited on the surface ofthe underlying substrate or they may be formed directly on the surfaceof the substrate. These lower level conductors 26 are formed under arelatively small angle with the Y-Y′ axis, an angle of between about 5and 30 degrees. After the lower level conductors have been formed,dielectric is deposited over the surface of the lower level ofconductors to a height that is the combined value of the height of thevertical interconnects 30 and the thickness of the upper levelconductors 28. A layer of ferromagnetic material is next selectivelydeposited whereby this layer covers the surface of the dielectric layerinto which the lower level conductor have been formed while it alsocovers the surface of the lower level conductors. The ferromagneticmaterial does not overlay the surface areas for the verticalinterconnects that are contained in the upper surface of the lower levelconnector but is bounded by these geometric centers. After theferromagnetic material has been deposited, a layer of dielectric isdeposited over the layer of ferromagnetic material thereby including thesurface areas of the lower level conductors that protrude from the lowerregions of the layer of ferromagnetic material. The conventional dualdamascene process then allows for the creation of the verticalinterconnects 30 at the same time that the upper level of conductors 28are created. After this dual damascene process has been completed, thenow completed helix coil of the invention can be covered with apassivation layer to protect the coil from environmentally induceddamage. In performing the dual damascene process, it must be noted thatthe input and output connections 22/24 for the helix coil are to besimultaneously created thus providing the means of accessing the helixcoil.

[0095]FIG. 3b shows a X-X′ cross section of the helix coil inductor ofthe invention with a uniform conductor height whereby ferromagneticmaterial 42 is incorporated.

[0096]FIG. 3c shows a Y-Y′ cross section of the helix coil inductor ofthe invention with a uniform conductor height whereby ferromagneticmaterial 42 is incorporated.

[0097]FIG. 4 addresses the third embodiment of the invention, which is ahelix coil inductor of the invention that uses vertical interconnects 44of non-uniform heights. It is in this respect important to reiterate theconcepts of upper conductor 28, lower level conductor 26 and verticalinterconnect 44 between the upper and the lower level conductor. Themain point of interest under the third embodiment of the invention isthe length of the vertical interconnection 44 between the lower level(26) and the level upper (28) conductors that form the helix coil of theinvention. One such vertical interconnect has been highlighted asinterconnect 44 in FIG. 4a. By evaluating the comparative heights of theother vertical interconnects that are shown in FIG. 4a it is clear thatthe height of these interconnects is not constant but varies betweenadjacent vertical interconnects when proceeding in the X-X′ direction ofthe helix coil. The lower level inductors of the helix coil are in oneplane, the distance between the upper conductors and the lower levelconductors (which is the length of the vertical interconnects betweenthe upper and the lower level conductors) varies with a maximum distancebeing present in the center of the coil where the X-X′ and the Y-Y′ axisintersect, from which maximum the distance between upper and lower levelconductors of the helix coil decreases in equal steps between adjacentconductors of the helix coil when progressing in either direction in thedirection of the X-X′ axis of the helix coil. This structure of varyingdistances between adjacent upper and lower level conductors of the helixcoil of the invention further concentrates the electromagnetic field ofthe helix coil around the center of the helix coil whereby the center ofthe helix coil is located underneath the longest upper level conductorof the helix coil and in the cross section of the helix coil in the Y-Y′direction where the vertical interconnects have a maximum height,whereby the center point is removed from this longest upper conductor bya distance that is equal to half the average height of the verticalinterconnects between the upper and the lower level conductors of thehelix coil. The height of a vertical interconnect is thereby understoodto be the length of a vertical interconnect between the upper surface ofthe lower level conductor and the lower surface of the upper conductorto which the vertical interconnect is connected.

[0098]FIG. 4a is an extended three-dimensional view of the helix coilinductor of the invention with a non-uniform conductor height. Theconcept of the different heights of the vertical interconnects betweenthe upper and the lower level conductors of the helix coil of theinvention is clear from this expanded view that is shown in FIG. 4a.

[0099] The method of forming the helix coil of the invention that has anon-uniform height in a direction that is perpendicular to the surfaceof the underlying substrate is as follows. The process of creating thehelix coil conductor of the invention uses the following steps. Thelower level conductors 26 are first formed, these conductors may beformed on top of a layer of dielectric that has been deposited on thesurface of the underlying substrate or they may be formed directly onthe surface of the substrate. These lower level conductors 26 are formedunder a relatively small angle with the Y-Y′ axis, an angle of betweenabout 5 and 30 degrees. After the lower level conductors have beenformed, the balance of the process for forming the helix coil that isshown in FIG. 4a proceeds in incremental steps where each of the stepsis controlled by the height of the respective vertical interconnectsthat must be implemented. It must in this be remembered that an inductoris created with as objective to establish certain electrical performanceparameters for the coil. From this it immediately follows that thephysical design parameters for the coil are determined by the expectedelectrical parameters of the coil. These physical design parameters aremany, one of the key parameters for the coil that is shown in FIG. 4aand that is of interest at this point is the height of the verticalinterconnects that connect the lower level conductors with the upperlevel conductors. By way of example a set of two upper and lower levelconductors highlighted with 26′ (for the two lower level conductors),28′ (for the two upper level conductors) and the thereby belongingvertical interconnect 44′ have been highlighted. some observations arerelating to these two sets of conductors are in order.

[0100] 1) the lower level conductors 26′ are at this stage of theprocess of creating the helix coil in place

[0101] 2) all four vertical interconnect 44′ are of equal height

[0102] 3) the two upper level conductors 28′ are of equal length, andequal thickness, and

[0103] 4) all other physical design parameters such as conductor width,material used for the conductor are the same for the two upper levelconductors 28′.

[0104] From this it becomes clear that the above indicated steps ofcreating the coil of the invention that is shown in FIG. 4a requires arepeat cycle whereby, during each cycle, a set of vertical interconnectstogether with the connecting upper level conductors is being created. Itis not unreasonable to suggest that there are N different values for theheight Hv is the vertical interconnects whereby the value of Hvincrementally increases from a minimum value (at the extremities of thecoil in the direction of the X-X′ axis) to a maximum value (at the pointwhere the coil intersects with the Y-Y′ axis). If it is assumed thatHvmin=Hv1 is the lowest value of the height of the respective verticalinterconnects and Hvmax then the first step after the completion of thelower level conductors is to deposit a first layer of dielectric overthe lower level of conductors, this layer of dielectric having athickness that equals the sum of Hvmin plus the required thickness ofthe upper level of conductors. Before the upper level of conductors andthe therewith connected vertical interconnects can be created, input andoutput connections 22 an 24 must be created. For this purpose a firstlayer of dielectric is deposited which has a thickness that is equal tothe vertical interconnect 44″ (that is used to connect the I/Oconnectors to the coil) plus the thickness of an upper level conductor.After this first layer of dielectric has been deposited, the dualdamascene procedure allows for the simultaneous creation of the verticalinterconnects 44″ (two in number) and I/O conductors 22 and 24 (two innumber). After the I/O connects 22/24 have been created, the upper levelconductors and the thereby belonging vertical interconnects can becreated again using the dual damascene process. A second layer ofdielectric is deposited over the surface of the first layer ofdielectric, the thickness of this second layer of dielectric is equal tothe sum of the interconnects 44′ and the thickness of the upper levelconductor. The dual damascene process now allows for the creation of thevertical interconnects 44′ (four in number) and the upper levelconductors 28′ (two in number). These processing steps of depositing alayer of dielectric (with a thickness that is equal to the combinedvalue of the height of the vertical interconnect that is to be containedin this layer of the dielectric plus the thickness of the upper levelconnector that connects the two to be created vertical interconnects)followed by the dual damascene step of etching the vertical interconnectand the connecting upper level conductor are repeated. With the dualdamascene step that has been indicated herein it is assumed that as partof this step metal is deposited to fill the created openings and thatthis deposited layer of metal may optionally be planarized. By repeatingthese processing steps the point is reached where the last upper levelconductor must be created. This in essence uses the same procedures thathave been applied for the creation of the preceding upper levelconductors with the exception that only two vertical interconnects arecreated with one thereby belonging upper level conductor, this inaccordance with the coil that is shown in FIG. 4a. There is no reason toassume that the process of the invention must end with only one longestupper level conductor, it is perfectly feasible to have for instancethree or any other number of upper level conductors that are of onemaximum length.

[0105] After the last dual damascene process has been completed, the nowcompleted helix coil of the invention can be covered with a passivationlayer to protect the coil from environmentally induced damage.

[0106]FIG. 4b shows an X-X′ cross section of the helix coil inductor ofthe invention with a non-uniform conductor height. The cross sectionthat is shown in FIG. 4b shows very clearly the variation in the heightof the vertical interconnects between the upper and the lower levelconductors that form the helix coil of the invention. The verticalinterconnect that is highlighted with 44 is representative of thevertical interconnects of the helix coil, adjacent to verticalinterconnect 44 are interconnects that are of non-uniform heights.

[0107]FIG. 4c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a non-uniform conductor height.

[0108]FIG. 4c shows the varying lengths of the upper level conductors 46that are part of the body of the helix coil of the invention. Where theupper level conductor is labeled 46, this label is meant to representany and all of the upper level conductors of the helix coil.

[0109]FIGS. 5a through 5 c present the fourth embodiment of theinvention and show the helix coil of the invention that is identical tothe helix coil of the third embodiment of the invention (as shown inFIG. 4a through 4 c) with the exception that a ferromagnetic core 48 hasbeen incorporated into the helix of the invention. This ferromagneticcore 48 is interposed between the upper and the lower level conductorsof the helix core.

[0110]FIG. 5a is an extended three-dimensional view of the helix coilinductor of the invention with a non-uniform conductor height wherebyferromagnetic material 48 is incorporated.

[0111] The processing steps that are required to create the structure ofthe coil as it shown in FIG. 5a combines that process of firstdepositing a layer of ferromagnetic material, as it must be done for thecreation of the coil that is shown in FIG. 3a, after which the variousheights of vertical interconnects and the upper level conductors thatconnect these vertical interconnects is performed as has previously beendescribed in detail under FIG. 4a above.

[0112]FIG. 5b shows an X-X′ cross section of the helix coil inductor ofthe invention with a non-uniform conductor height whereby ferromagneticmaterial 48 is incorporated.

[0113]FIG. 5c shows an Y-Y′ cross section of the helix coil inductor ofthe invention with a non-uniform conductor height whereby ferromagneticmaterial 48 is incorporated.

[0114]FIG. 6 shows a graphic depiction of the Q factor as a function offrequency for a conventional spiral inductor and for the helix coilinductor of the invention. The frequency of application of the inductoris plotted (in GHz) along the horizontal axis of the graph, the Q factorof the inductor is plotted along the vertical axis (in units of qualityfactor). Curve a depicts the relation between Q and the frequency ofapplication for the conventional spiral inductor while curve b depictsthe relation between Q and the frequency of application for the helixcoil inductor of the first embodiment of the invention. The advantagegained by the helix coil of the invention is clear, the Q factor of thehelix coil of the invention only starts to decrease after an operationalfrequency of 3 GHz has been reached.

[0115]FIG. 7 shows a graphic depiction of the Q factor as a function offrequency for the helix coil inductor of the invention and for the helixcoil inductor of the invention to which a ferromagnetic core has beenadded. The frequency of application of the inductor is plotted (in GHz)along the horizontal axis of the graph, the Q factor of the inductor isplotted along the vertical axis (in units of quality factor). Curve “a”depicts the relation between Q and the frequency of application for thehelix coil inductor of the invention while curve “b” depicts therelation between Q and the frequency of application for the helix coilinductor of the invention to which a ferromagnetic core has been added.The advantage gained by the addition of ferromagnetic core to the helixcoil of the invention is clear, the Q factor of the helix coil of theinvention only starts to decrease after an operational frequency of 3GHz has been reached.

[0116] The following data further quantify the results that have beensummarized by the graphs that are shown in FIGS. 6 and 7. #1 #2 #3 #11.0 1.0  1.0 um #2 1.0 1.0  1.0 um #3 10.0 4.0  4.0 um #4 2.0 1.0  1.0um #5 50.0 200   200 um #6 1520 4000  4000 um #7 21,868 9,500  9,500 um²#8 3.48 10.70 14.84 nH #9 1.80 6.10 7.64 #10 3.70 8.47 10.68 #11 5.009.30 10.87 #12 207% 326% #13 238% 324% #14 129% 188% #15  86%  98% #16 57%  57%

[0117] wherein:

[0118] column #1 represents the conventional spiral inductor

[0119] column #2 represents the helix coil inductor of the invention ofuniform height without ferromagnetic core

[0120] column #3 represents the helix coil inductor of the invention ofuniform height with ferromagnetic core, while:

[0121] row #1 represents metal 1 thickness

[0122] row #2 represents metal 2 thickness

[0123] row #3 represents conductor width

[0124] row #4 represents conductor spacing

[0125] row #5 represents the smaller (par. 22, FIG. 1) inner conductorlength

[0126] row #6 represents total conductor length

[0127] row #7 represents total chip surface area

[0128] row #8 represents inductance value

[0129] row #9 represents Q value at 1 GHz

[0130] row #10 represents Q value at 2 GHz

[0131] row #11 represents Q value at 3 GHz

[0132] row #12 represents the percentile improvement in inductive valuewhen compared with the conventional spiral inductor

[0133] row #13 represents the percentile improvement in Q value at 1 GHzwhen compared with the conventional spiral inductor

[0134] row #14 represents the percentile improvement in Q value at 2 GHzwhen compared with the conventional spiral inductor

[0135] row #15 represents the percentile improvement in Q value at 3 GHzwhen compared with the conventional spiral inductor

[0136] row #16 represents the reduction in total chip area required whencompared with the conventional spiral inductor.

[0137] It is clear from the above indicated data that the improvementsthat are obtained by the helix coil inductor of the invention are notonly obvious but also very significant.

[0138] Although the invention has been described and illustrated withreference to specific illustrative embodiments thereof, it is notintended that the invention be limited to those illustrativeembodiments. Those skilled in the art will recognize that variations andmodifications can be made without departing from the spirit of theinvention. It is therefore intended to include within the invention allsuch variations and modifications which fall within the scope of theappended claims and equivalents thereof.

What is claimed is:
 1. A structure of a helix coil inductor that can be created on a surface of a silicon substrate having a plane, said surface of said silicon substrate having Cartesian X and Cartesian Y coordinates with corresponding X and Y axis perpendicularly intercepting, whereby said point of interception of said X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the substrate point of Cartesian intercept said helix coil being of uniform height, comprising: a multiplicity of lower level inductors located in a plane that is parallel with a plane of a surface of said silicon substrate; a multiplicity of upper level inductors located in a plane that is parallel with said plane of a surface of said silicon substrate whereby said upper level connectors are separated from said lower level conductors; and a multiplicity of vertical interconnects located in a plane that is perpendicular with a plane of a surface of said silicon substrate.
 2. The structure of claim 1 wherein each of said lower level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said lower level conductor henceforth referred to as lower level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as lower level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-circle; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor upper surface whereby said lower level conductor upper surface contains two interconnect surface areas located at both extremities of length of said lower level conductor upper surface such that each of said interconnect surface areas is bounded on one side by said lower level conductor widthwise sidewall henceforth referred to as lower level conductor interconnect surface areas; a lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor lower surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said lower level conductor upper surface henceforth referred to as lower level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 3. The structure of claim 2 whereby each of said interconnect surface areas is a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said circle forms said geometric center of said lower level conductor interconnect surface areas whereby said geometric center is located on said lower level conductor geometric center line at a distance from said widthwise sidewalls of said lower level conductors that is equal to said radius of said circle that forms said interconnect surface areas.
 4. The structure of claim 1 wherein each of said upper level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said upper level conductor henceforth referred to as upper level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as upper level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-circle; an lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor lower surface whereby said upper level conductor lower surface contains two interconnect surface areas located at both extremities of length of said upper level conductor lower surface such that each of said interconnect surface areas is bounded on one side by said upper level conductor widthwise sidewall henceforth referred to as upper level conductor interconnect surface areas; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor upper surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said upper level conductor lower surface henceforth referred to as upper level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 5. The structure of claim 4 whereby each of said interconnect surface areas have a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said circle forms said geometric center of said upper level conductor interconnect surface areas whereby said geometric center is located on said upper level conductor geometric center line at a distance from said widthwise sidewalls of said upper level conductors that is equal to said radius of said circle that forms said interconnect surface areas.
 6. The structure of claim 1 wherein each of said vertical interconnects contains: a height henceforth referred to as vertical interconnect height; and a circular cross section having a geometric center that is formed by a line that interconnects two or more centers of two or more of said circular cross sections henceforth referred to as vertical interconnect cross section.
 7. The structure of claim 1 wherein said helix coil inductor is created overlying helix coil Cartesian X and Cartesian Y coordinates with corresponding helix coil X axis and Y axis perpendicularly intercepting, whereby said point of interception of said helix coil X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the helix coil point of Cartesian intercept, whereby said helix coil further contains: a length in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said X Cartesian coordinate henceforth referred to as a helix coil length; a width in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said Y Cartesian coordinate henceforth referred to as a helix coil width; and a height in a plane that is perpendicular to said plane of said surface of said silicon substrate that is henceforth referred to as a helix coil height that henceforth will be referred to as a helix coil height.
 8. The structure of claim 1 whereby said substrate point of Cartesian intercept coincides with said helix coil point of Cartesian intercept whereby said helix coil point of Cartesian intercept is selected on said surface of said substrate as a location where said helix coil inductor is to be created thereby implying a fixed orientation of said helix coil Cartesian X axis and Cartesian Y axis.
 9. The structure of claim 1 wherein said upper level conductors contain: a conductor created in equal lengths in a direction of said Y and the Y′ axis of said helix coil Cartesian coordinates that is of an upper level conductor length that is longer than all other conductors contained within said upper level conductors henceforth referred to as the maximum length upper level conductor; and a multiplicity of conductors that are created parallel with said maximum length upper level conductor that are located on both sides of said maximum length upper level conductor whereby the length of said multiplicity of conductors is created in equal lengths in the Y and the Y′ direction of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of conductors uniformly decreases with increasing distance between said maximum length upper level conductor and said each of said multiplicity of conductors.
 10. The structure of claim 9 whereby said geometric centers of said interconnect surface areas of said lower surface of said maximum length upper level conductor are located on said Y-Y′ axis of said helix coil Cartesian coordinates and at equal distances from said intersect of said helix coil Cartesian coordinates at points +Y max. upper and −Y max. upper.
 11. The structure of claim 1 wherein said lower level inductors contain: a first and a second lower level conductor henceforth referred to as maximum length lower level conductors extending in equal lengths from points of intercept of their upper surface geometric lengthwise center with said X-X′ axis of said helix coil Cartesian coordinates whereby said points of intercept are located equidistant from the point of intercept of the X-X′ and Y-Y′ axis of said helix coil Cartesian coordinates whereby said lengthwise geometric centers of said upper surfaces of said lower conductors intercept under an angle with the Y-Y′ direction of said helix coil Cartesian coordinates whereby furthermore said first and second lower level conductor are of a lower level conductor lengths that is longer than all other lower level conductors that are contained within said multiplicity of lower level conductors henceforth referred to as maximum length lower level conductors whereby furthermore a geometric center of said interconnect surface area of said first maximum length lower level conductor of coincides with said point +Y max. upper whereby a geometric center of said interconnect surface areas of said second maximum length lower level conductor coincides with said point −Y max. upper; and a multiplicity of conductors that are created parallel with said maximum length lower level conductors that are located in essentially equal numbers on both sides of said maximum length lower level conductors extending in equal lengths from a point of intercept of said geometric centers of said lower surfaces of each of said lower level conductors with said X-X′ axis of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of lower level conductors uniformly decreases with increasing distance between said maximum length lower level conductors and said each of said multiplicity of conductors.
 12. The structure of claim 1 wherein said upper level conductors and said lower level conductors are joined by means of said vertical interconnects such that: a first and second vertical interconnect is provided to said maximum length upper level conductor overlying said interconnect surface area of said lower surface of said maximum length upper level conductor whereby said vertical interconnects face towards said upper surface of said lower level conductor whereby said geometric centers of said vertical interconnects coincides with said geometric centers of said interconnect areas of said lower surface of said maximum length upper level conductor; and a geometric center of said interconnect surface areas of said first and second maximum length lower level conductors is aligned with and connected to said first and second vertical interconnect provided to said maximum length upper level conductor.
 13. The structure of claim 1 whereby said structure is embedded in a dielectric and furthermore covered by a layer of passivation.
 14. The structure of claim 1 with the addition of one or more layers of ferromagnetic material overlying said lower level of conductors over a height that essentially equals the height of said vertical interconnects.
 15. The structure of claim 1 whereby said maximum length upper level conductor and said maximum length lower level conductor is not restricted to one upper level conductor and two lower level conductors but is extended to a multiplicity of upper level and lower level conductors with the centrally located conductor of said multiplicity of conductors assuming the structural function that is equivalent to the structural function of said single maximum length upper level conductor and said two maximum length lower level conductors.
 16. The structure of claim 1 wherein said length of said vertical interconnects is not constant but is decreased from a maximum value in equal and incremental steps to a minimum value whereby said maximum value is used as vertical interconnect to said maximum length upper level conductor whereby, starting with the height of said maximum height vertical interconnect, the height for each adjacent vertical interconnect is symmetrically reduced when proceeding in said X-X′ direction of said helix coil Cartesian coordinates whereby said Y axis of said helix coil Cartesian coordinates forms a center of symmetry of said reduction whereby the vertical interconnect that is located further removed from said helix coil point of Cartesian intercept has a lower value than its adjacent vertical interconnect that is located closer to said helix coil point of Cartesian intercept.
 17. The structure of claim 16 with the addition of one or more layers of ferromagnetic material overlying said lower level of conductors over a height that essentially equals the maximum height of said vertical interconnects.
 18. The structure of claim 1 whereby input and output connections are provided to said structure by providing interconnects to two upper level or lower level conductors of said structure that are of shortest length when compared to all other upper level or lower level conductors of said helix coil.
 19. A structure of an inductor that can be created on a surface of a silicon substrate having a surface comprising a helix shaped coil containing lower level conductors in a plane that is parallel with a plane of said surface of said substrate further comprising upper level conductors in a plane that is parallel with a plane of said surface of said substrate further comprising interconnects having a height in a plane that is perpendicular to a plane of said surface of said substrate whereby said interconnects connect said lower level conductors to said upper level conductors thereby leaving a space between said upper and lower level conductors whereby a combined structure of lower level conductors, upper level conductors and interconnects has a form of a helix having an axis, a length, a width that varies in the direction of said axis from a maximum width at a center of said axis to smaller values of width when proceeding from said center of said axis in either direction of said center and a heights whereby said axis is in a plane that is parallel with said plane of said surface of said substrate.
 20. The structure of claim 19 whereby said height of said interconnects is constant.
 21. The structure of claim 20 whereby said spacing between said upper and lower level conductors contains a dielectric.
 22. The structure of claim 20 whereby said spacing between said upper and lower level conductors contains a ferromagnetic material.
 23. The structure of claim 19 whereby said height of said interconnects is variable whereby a maximum value of height coincides with a maximum width of said helix coil from where said height decreases uniformly and symmetrically when proceeding in said X-X′ direction of said helix coil Cartesian coordinates whereby said Y axis of said helix coil Cartesian coordinates forms a center of symmetry of said reduction.
 24. The structure of claim 23 whereby said spacing between said upper and lower level conductors contains a dielectric.
 25. The structure of claim 23 whereby said spacing between said upper and lower level conductors contains a ferromagnetic material.
 26. A method for creating a helix coil inductor having a body that is contained within outer boundaries of said body that can be created on a surface of a silicon substrate having a plane, said surface of said silicon substrate having Cartesian X and Cartesian Y coordinates with corresponding X and Y axis perpendicularly intercepting, whereby said point of interception of said X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the substrate point of Cartesian intercept said helix coil having an axis having a direction whereby said direction of said axis is parallel with said surface of said substrate, comprising: creating a multiplicity of N−1 lower level inductors located in a plane that is parallel with a plane of a surface of said silicon substrate; and creating a multiplicity of 2N vertical interconnects having a circular cross section having a radius located in a plane that is perpendicular with said plane of said surface of said silicon substrate while simultaneously creating a multiplicity of N upper level inductors located in a plane that is parallel with said plane of said surface of said silicon substrate whereby said upper level connectors are separated from said lower level conductors by a distance.
 27. The method of claim 26 wherein said creating a multiplicity of N−1 lower level conductors comprises the steps of: depositing a first layer of dielectric over said surface of said substrate said first layer of dielectric having a thickness; depositing a second layer of intra-metal dielectric over said first layer of dielectric said second layer of intra-metal dielectric having a surface; patterning and etching said second layer of intra-metal dielectric thereby creating trenches for said multiplicity of lower level conductors; filling said trenches for said multiplicity of lower level conductors with a first level of metal; and planarizing said first level of metal down to the surface of said second layer of intra-metal dielectric thereby creating said multiplicity of lower level conductors.
 28. The method of claim 26 wherein each of said lower level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said lower level conductor henceforth referred to as lower level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as lower level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-cylinder; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor upper surface whereby said lower level conductor upper surface contains two interconnect surface areas located at both extremities of length of said lower level conductor upper surface such that each of said interconnect surface areas is bounded on one side by said lower level conductor widthwise sidewall henceforth referred to as lower level conductor interconnect surface areas; a lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor lower surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said lower level conductor upper surface henceforth referred to as lower level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 29. The method of claim 28 whereby said lower level conductor upper surface contains two interconnect surface areas that have a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said geometric circle forms said geometric center of said lower level conductor interconnect surface area whereby said geometric center is located on and as end-points of said lower level conductor geometric center line at a distance from said widthwise sidewalls of said lower level conductors that is equal to said radius of said circle that forms said interconnect conductor surface areas.
 30. The method of claim 26 wherein creating a multiplicity of 2N vertical interconnects located in a plane that is perpendicular with a plane of a surface of said silicon substrate while simultaneously creating a multiplicity of N upper level inductors located in a plane that is parallel with said plane of a surface of said silicon substrate whereby said upper level connectors are separated from said lower level conductors by a distance comprises the steps of: depositing a third layer of intra-metal dielectric having a surface containing one or more layers of intra-level dielectric over said second layer of intra-level dielectric thereby including the surface of said multiplicity of lower level conductors; patterning and etching third layer of intra-metal dielectric thereby creating dual damascene structures whereby vias of said dual damascene structure form said vertical interconnect conductors that align with said lower level conductor interconnect surface areas while dual damascene trenches form said upper level conductors; depositing a second layer of metal over said third layer of intra-level dielectric thereby including said vias created in said third layer of intra-metal dielectric; and planarizing said second layer of metal down to the surface of said third layer of intra-metal dielectric.
 31. The method of claim 30 wherein each of said vertical interconnects contains: a height henceforth referred to as vertical interconnect height; a top surface that is in a plane that is parallel with said plane of said substrate and removed from said substrate by a distance that equals said height of said vertical interconnect; and a circular cross section having a geometric center that is formed by a line that interconnects two or more centers of two or more of said circular cross sections henceforth referred to as vertical interconnect cross section.
 32. The method of claim 30 wherein each of said upper level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said upper level conductor henceforth referred to as upper level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as upper level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-circle; a lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as an upper level conductor lower surface whereby said upper level conductor lower surface contains two interconnect surface areas located at both extremities of length of said upper level conductor lower surface such that each of said interconnect surface areas is bounded on one side by said upper level conductor widthwise sidewall henceforth referred to as upper level conductor interconnect surface areas; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor upper surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said upper level conductor lower surface henceforth referred to as upper level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 33. The method of claim 32 whereby said upper level conductor interconnect surface areas have a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said circle forms said geometric center of said upper level conductor interconnect surface area whereby said geometric center is located on and as end-points to said upper level conductor geometric center line at a distance from said widthwise sidewalls of said upper level conductors that is equal to said radius of said circle that forms said interconnect surface areas.
 34. The method of claim 26 wherein said helix coil inductor is created overlying helix coil Cartesian X and Cartesian Y coordinates with corresponding helix coil X axis and Y axis perpendicularly intercepting, whereby said point of interception of said helix coil X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the helix coil point of Cartesian intercept, whereby said helix coil further contains: a length in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said X Cartesian coordinate henceforth referred to as a helix coil length; a width in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said Y Cartesian coordinate henceforth referred to as a helix coil width; and a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a helix coil height.
 35. The method of claim 26 whereby said substrate point of Cartesian intercept coincides with said helix coil point of Cartesian intercept whereby said helix coil point of Cartesian intercept is selected on said surface of said substrate as a location where said helix coil inductor is to be created thereby implying a fixed orientation of said helix coil Cartesian X axis and Cartesian Y axis.
 36. The method of claim 26 wherein said 2N upper level conductors contain: a conductor created in equal lengths in a direction of said Y and said Y′ axis of said helix coil Cartesian coordinates that is of an upper level conductor length that is longer than all other conductors contained within said upper level conductors henceforth referred to as a maximum length upper level conductor; and a multiplicity of 2N−1 conductors that are created parallel with said maximum length upper level conductor that are located in equal numbers on both sides of said maximum length upper level conductor whereby the length of said multiplicity of conductors is created in equal lengths in the Y and the Y′ direction of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of conductors uniformly decreases with increasing distance between said maximum length upper level conductor and each of said multiplicity of conductors.
 37. The method of claim 36 whereby said geometric centers of said interconnect surface areas of said lower surface of said maximum length upper level conductor are located on said Y-Y′ axis of said helix coil Cartesian coordinates and at equal distances from said intersect of said helix coil Cartesian coordinates at point +Y max. upper for a first geometric and −Y max. upper for a second geometric center.
 38. The method of claim 26 wherein said N−1 lower level inductors contain: a first and a second lower level conductor extending from points of intercept of their upper surface geometric lengthwise center with said X-X′ axis of said helix coil Cartesian coordinates whereby said points of intercept are located equidistant from the point of intercept of the X-X′ and Y-Y′ axis of said helix coil Cartesian coordinates whereby said lengthwise geometric centers of said upper surfaces of said lower conductors intercept under an angle with the Y-Y′ direction of said helix coil Cartesian coordinates whereby furthermore said first and second lower level conductor are of a lower level conductor lengths that is longer than all other lower level conductors that are contained within said multiplicity of lower level conductors henceforth referred to as maximum length lower level conductors whereby furthermore a first geometric center of said interconnect surface area of said first maximum length lower level conductor coincides with said point +Y max. upper thereby leaving a second geometric center of said interconnect surface area of said first maximum length lower level conductor available whereby a first geometric center of said interconnect surface areas of said second maximum length lower level conductor coincides with said point −Y max. upper thereby leaving a second geometric center of said interconnect surface areas of said second maximum length lower level conductor available; and a multiplicity of 2N−3 conductors that are located in equal numbers on both sides of said maximum length lower level conductors extending from a point of intercept of said geometric centers of said lower level conductors with said X-X′ axis of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of lower level conductors uniformly decreases with increasing distance with said maximum length lower level conductors.
 39. The method of claim 26 wherein said upper level conductors and said lower level conductors are joined by means of said vertical interconnects such that: a first and second vertical interconnect is provided to said maximum length upper level conductor overlying said first and second geometric center of said interconnect surface areas of said lower surface of said maximum length upper level conductor whereby said vertical interconnects face towards said upper surface of said lower level conductor whereby said geometric center of said first vertical interconnect coincides with said first geometric center of said interconnect surface area of said first maximum length lower level conductor whereby said geometric center of said second vertical interconnect coincides with said first geometric center of said interconnect surface area of said second maximum length lower level conductor thereby leaving a second geometric center of said interconnect surface areas available on each of said first and second maximum length lower level conductors; interconnecting in descending order of upper level and lower level conductor length and starting with connecting an upper level conductor to said available second geometric center of said interconnect surface areas on each of said first and second maximum length lower level conductors thereby leaving available a geometric center of said interconnect surface of said lower level conductors said interconnecting aligning one geometric center of said interconnect surface of said lower level conductors with one geometric center of said interconnect surface of said upper level conductors in descending order of upper level and lower level conductor length said procedure of connecting upper level conductors to lower level conductors to continue to where all N upper level and N−1 lower conductors that belong to said helix coil have been interconnected thereby creating a helix conductor structure that is symmetrical with said Y-Y′ axis as the center of said symmetry.
 40. The method of claim 39 whereby two additional lower level conductors of equal length with a length that is shorter when compared with all other lower level conductors are reserved for input/output connections with said helix coil whereby said input output connection is established by providing a vertical interconnect conductor to said remaining available geometric centers of said interconnect areas of said upper surface of said additional lower level conductor further providing two upper level conductors of extended length that align with said provided vertical interconnect conductors.
 41. The method of claim 26 whereby said helix coil is embedded in a dielectric and furthermore covered by a layer of passivation.
 42. The method of claim 27 whereby said depositing a first layer of dielectric over said surface of said substrate said first layer of dielectric having a thickness is eliminated thereby depositing said second layer of intra-metal dielectric on said surface of said substrate.
 43. The method of claim 30 of creating a multiplicity of 2N vertical interconnects while simultaneously creating a multiplicity of N upper level inductors whereby spacing between said upper level and said lower level conductors of said helix coil inductor is filled with ferromagnetic material whereby said layer of ferromagnetic material is deposited to a height that equals said height of said vertical interconnect conductors whereby said layer of ferromagnetic material is bounded by a ferromagnetic boundary of six planes that are perpendicular to said surface of said substrate whereby four of said six planes of said ferromagnetic boundary are within said body of said helix coil and parallel to four straight lines that connect adjacent geometric centers of said lower level conductor interconnect surface areas along said boundaries of said body of said helix coil while said four planes are not overlying or intersecting with said lower level conductor interconnect surface areas while being distanced from said lower level conductor interconnect surface areas within said body of said helix coil whereby two planes of said ferromagnetic boundary of said layer of ferromagnetic material contain one lengthwise sidewall of each of two lower level conductors that are of shortest length when compared with all other lower level conductors wherein said sidewalls form part of said boundary of said helix coil comprising the additional step of: depositing a layer of dielectric having attributes of said third layer of dielectric over said lower level conductors said step of depositing a layer of dielectric replacing said step of depositing a third layer of intra-metal dielectric whereby said additional steps are followed by said step of patterning and etching third layer of intra-metal dielectric; patterning and etching said layer of dielectric in accordance with said ferromagnetic pattern; depositing a layer of ferromagnetic material having a surface over a surface of said layer of dielectric; and polishing said layer of ferromagnetic material down to the surface of said layer of dielectric thereby leaving a layer of ferromagnetic material in place overlying said lower level horizontal conductors.
 44. A method for creating a helix coil inductor that can be created on a surface of a silicon substrate having a plane, said surface of said silicon substrate having Cartesian X and Cartesian Y coordinates with corresponding X and Y axis perpendicularly intercepting, whereby said point of interception of said X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the substrate point of Cartesian intercept whereby said helix coil is of non-uniform height in a plane that is perpendicular to said surface of said substrate, comprising: creating a multiplicity of N−1 lower level inductors located in a plane that is parallel with a plane of a surface of said silicon substrate; and creating a multiplicity of 2N vertical interconnect conductors having a circular cross section with a radius located in a plane that is perpendicular with a plane of a surface of said silicon substrate whereby said vertical interconnects are of non-uniform height whereby said creating a multiplicity of vertical interconnects is combined with creating a multiplicity of N upper level inductors having a thickness located in a plane that is parallel with said plane of a surface of said silicon substrate whereby said upper level connectors are separated from said lower level conductors.
 45. The method of claim 44 wherein said creating a multiplicity of N−1 lower level conductors comprises the steps of: depositing a first layer of dielectric over said surface of said substrate said first layer of dielectric having a thickness; depositing a second layer of intra-metal dielectric over said first layer of dielectric said second layer of intra-metal dielectric having a surface; patterning and etching said second layer of intra-metal dielectric thereby creating trenches for said multiplicity of lower level conductors; filling said trenches for said multiplicity of lower level conductors with a first level of metal; and planarizing said first level of metal down to the surface of said second layer of intra-metal dielectric thereby creating said multiplicity of lower level conductors.
 46. The method of claim 45 whereby said depositing a first layer of dielectric over said surface of said substrate said first layer of dielectric having a thickness is eliminated thereby depositing said second layer of intra-metal dielectric on said surface of said substrate.
 47. The method of claim 44 wherein each of said lower level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said lower level conductor henceforth referred to as lower level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as lower level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-circle; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor upper surface whereby said lower level conductor upper surface contains two interconnect surface areas located at both extremities of length of said lower level conductor upper surface such that each of said interconnect surface areas is bounded on one side by said lower level conductor widthwise sidewall henceforth referred to as lower level conductor interconnect surface areas; a lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a lower level conductor lower surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said lower level conductor upper surface henceforth referred to as lower level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 48. The method of claim 47 whereby said lower level conductor interconnect surface areas have a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said circle forms said geometric center of said lower level conductor interconnect surface areas whereby said geometric center is located on said lower level conductor geometric center line at a distance from said widthwise sidewalls of said lower level conductors that is equal to a radius of the circle that forms said interconnect surface areas.
 49. The method of claim 44 wherein said creating a multiplicity of 2N vertical interconnects of non-uniform height located in a plane that is perpendicular with a plane of a surface of said silicon substrate combined with creating a multiplicity of N upper level inductors located in a plane that is parallel with said plane of a surface of said silicon substrate whereby said vertical interconnect conductors have a varying height that incrementally varies from a minimum height of Hvmin to a maximum height of Hvmax in increments of DHv comprises the steps of: depositing a third layer of intra-metal dielectric having a thickness further having a surface over said second layer of intra-level dielectric thereby including the surface of said multiplicity of lower level conductors said third layer of intra-metal dielectric having a surface whereby a thickness of said third layer of dielectric equals DHv increased by said thickness of said upper level conductor; patterning and etching third layer of intra-metal dielectric thereby creating two dual damascene structures that are equally spaced from said Y-Y′ axis whereby vias of said dual damascene structures form said vertical interconnect conductors of height Hvmin that align with underlying conductors of said lower level conductor interconnect surface areas whereby dual damascene trenches are parallel with said Y-Y′ axis and form said upper level conductors; depositing a layer of metal over said third layer of dielectric; and planarizing said deposited layer of metal down to the surface of said third layer of dielectric; repeating said steps of depositing a third layer of intra-metal dielectric through planarizing said deposited layer of metal whereby for each repetition said third layer of dielectric that is deposited has a thickness of DHv plus said thickness of said upper level conductor whereby said patterning and etching said third layer of intra-metal dielectric results in vertical interconnect conductors of incremental height that is equal to the height of the previous vertical interconnect conductor increased by DHv whereby said vertical interconnects connect to underlying lower level connectors whereby furthermore upper level conductors are created that interconnect said vertical interconnect conductors and that intersect said Y-Y′ axis under an angle of 90 degrees.
 50. The method of claim 44 wherein each of said vertical interconnects contains: a height of non-uniform value henceforth referred to as vertical interconnect height whereby said height incrementally varies from a minimum height of Hvmin to a maximum height of Hvmax in increments of DHv; a top surface that is in a plane that is parallel with said plane of said substrate and removed from said substrate by a distance that equals a sum of said height of said vertical interconnect and said thickness of said first layer of dielectric; and a circular cross section having a geometric center that is formed by a line that interconnects two or more centers of two or more of said circular cross sections henceforth referred to as vertical interconnect cross section.
 51. The method of claim 44 wherein each of said upper level conductors contains: a width in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor width; a length in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor length; a height in a plane that is perpendicular to said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor height; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the length of said upper level conductor henceforth referred to as upper level conductor lengthwise sidewalls; vertical sidewalls in a plane that is perpendicular to said plane of said surface of said silicon substrate in a direction of the width of said conductor henceforth referred to as upper level conductor widthwise sidewalls whereby said vertical sidewalls have the contours of a semi-circle; an lower surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor lower surface whereby said upper level conductor lower surface contains two interconnect surface areas located at both extremities of length of said upper level conductor lower surface such that each of said interconnect surface areas is bounded on one side by said upper level conductor widthwise sidewall henceforth referred to as upper level conductor interconnect surface areas; an upper surface in a plane that is parallel with said plane of said surface of said silicon substrate henceforth referred to as a upper level conductor upper surface; and a geometric center line that is a line that is located in a geometric middle between said lengthwise sidewalls in a direction of said lengthwise sidewalls that is furthermore located in said upper level conductor lower surface henceforth referred to as upper level conductor geometric center line whereby endpoints for said geometric center line are removed from said widthwise sidewalls by a distance that equals said radius of said cross section of said vertical interconnect conductors.
 52. The method of claim 51 whereby said upper level conductor interconnect surface areas contain a surface area that is a geometric circle having a radius further having a geometric center whereby a center of said circle forms said geometric center of said upper level conductor interconnect surface areas whereby said geometric centers are located on and are end-points of said upper level conductor geometric center line at a distance from said widthwise sidewalls of said upper level conductors that is equal to a radius of the circle that forms said interconnect surface areas.
 53. The method of claim 44 wherein said helix coil inductor is created overlying helix coil Cartesian X and Cartesian Y coordinates with corresponding helix coil X axis and Y axis perpendicularly intercepting, whereby said point of interception of said helix coil X and Y axis is an arbitrary point on a surface of said substrate henceforth referred to as the helix coil point of Cartesian intercept, whereby said helix coil further contains: a length in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said X Cartesian coordinate henceforth referred to as a helix coil length; a width in a plane that is parallel with said plane of said surface of said silicon substrate that is measured in a direction of said Y Cartesian coordinate henceforth referred to as a helix coil width; and a non-uniform height in a plane that is perpendicular to said plane of said surface of said silicon substrate whereby said height of said helix coil varies symmetrically with said Y-Y′ axis as a center of symmetry.
 54. The method of claim 44 whereby said substrate point of Cartesian intercept coincides with said helix coil point of Cartesian intercept whereby said helix coil point of Cartesian intercept is selected on said surface of said substrate as a location where said helix coil inductor is to be created thereby implying a fixed orientation of said helix coil Cartesian X axis and Cartesian Y axis.
 55. The method of claim 44 wherein said upper level conductors contain: a conductor created in equal lengths in a direction of said Y and the Y′ axis of said helix coil Cartesian coordinates that is of an upper level conductor length that is longer than all other conductors contained within said upper level conductors henceforth referred to as the maximum length upper level conductor; and a multiplicity of conductors that are created parallel with said maximum length upper level conductor that are located on both sides of said maximum length upper level conductor whereby the length of said multiplicity of conductors is created in equal lengths in the Y and the Y′ direction of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of conductors uniformly decreases with increasing distance between said maximum length upper level conductor and said each of said multiplicity of conductors.
 56. The method of claim 55 whereby said geometric centers of said interconnect surface areas of said lower surface of said maximum length upper level conductor are located on said Y-Y′ axis of said helix coil Cartesian coordinates and at equal distances from said intersect of said helix coil Cartesian coordinates at points +Y max. upper and −Y max. upper.
 57. The method of claim 44 wherein said N−1 lower level inductors contain: a first and a second lower level conductor henceforth referred to as maximum length lower level conductors extending from points of intercept of their upper surface geometric lengthwise center with said X-X′ axis of said helix coil Cartesian coordinates whereby said points of intercept are located equidistant from the point of intercept of the X-X′ and Y-Y′ axis of said helix coil Cartesian coordinates whereby said lengthwise geometric centers of said upper surfaces of said lower conductors intercept under an angle with the Y-Y′ direction of said helix coil Cartesian coordinates whereby furthermore said first and second lower level conductor are of a lower level conductor lengths that is longer than all other lower level conductors that are contained within said multiplicity of lower level conductors henceforth referred to as maximum length lower level conductors whereby furthermore a first geometric center of said interconnect surface area of said first maximum length lower level conductor coincides with said point +Y max. upper thereby leaving a second geometric center of said interconnect surface area of said first maximum length lower level conductor available whereby a first geometric center of said interconnect surface areas of said second maximum length lower level conductor coincides with said point −Y max. upper thereby leaving a second geometric center of said interconnect surface areas of said second maximum length lower level conductor available; and a multiplicity of 2N−3 conductors that are located in equal numbers on both sides of said maximum length lower level conductors extending from a point of intercept of said geometric centers of said lower level conductors with said X-X′ axis of said helix coil Cartesian coordinates whereby furthermore the length of each of said multiplicity of lower level conductors uniformly decreases with increasing distance between said maximum length lower level conductors.
 58. The method of claim 44 wherein said upper level conductors and said lower level conductors are joined by means of said vertical interconnects such that: a first and second vertical interconnect is provided to said maximum length upper level conductor overlying said first and second geometric center of said interconnect surface areas of said lower surface of said maximum length upper level conductor whereby said vertical interconnects face towards said upper surface of said lower level conductor whereby said geometric center of said first vertical interconnect coincides with said first geometric center of said interconnect surface area of said first maximum length lower level conductor whereby said geometric center of said second vertical interconnect coincides with said first geometric center of said interconnect surface area of said second maximum length lower level conductor thereby leaving a second geometric center of said interconnect surface areas available on each of said first and second maximum length lower level conductors; interconnecting in descending order of upper level and lower level conductor length and starting with connecting an upper level conductor to said available second geometric center of said interconnect surface areas on each of said first and second maximum length lower level conductors thereby leaving available a geometric center of said interconnect surface of said lower level conductors said interconnecting aligning one geometric center of said interconnect surface of said lower level conductors with one geometric center of said interconnect surface of said upper level conductors in descending order of upper level and lower level conductor length said procedure of connecting upper level conductors to lower level conductors to continue to where all N upper level and N−1 lower conductors that belong to said helix coil have been interconnected thereby creating a helix conductor structure that is symmetrical with said Y-Y′ as the center of said symmetry.
 59. The method of claim 44 whereby said helix coil is embedded in a dielectric and furthermore covered by a layer of passivation.
 60. The method of claim 44 whereby a set of two lower level conductors of equal length that are of shortest length when compared with all other lower level conductors are reserved for input/output connections with said helix coil whereby said input output connection is established by providing a vertical interconnect conductor to said remaining available geometric centers of said interconnect areas of said upper surface of said lower level conductor further providing two upper level conductors of extended length that align with said provided vertical interconnect conductors whereby said two upper level conductors intersect said X-X′ axis under an angle of 90 degrees.
 61. The method of claim 49 for creating a helix coil inductor of non-uniform height whereby spacing between said upper level and said lower level conductors of said helix coil inductor is filled with ferromagnetic material comprising the additional step of selectively depositing a layer of ferromagnetic material over said lower level conductors whereby said layer of ferromagnetic material is deposited to a height that equals said height of said vertical interconnect conductors whereby said layer of ferromagnetic material is bounded by aaa whereby said layer of ferromagnetic material is bounded by a ferromagnetic pattern of six planes that are perpendicular to said surface of said substrate whereby four of said six planes of said ferromagnetic boundary are within said body of said helix coil and parallel to four straight lines that connect adjacent geometric centers of said lower level conductor interconnect surface areas along said boundaries of said body of said helix coil without said four planes overlying or intersecting with said lower level conductor interconnect surface areas while being distanced from said lower level conductor interconnect surface areas within said body of said helix coil whereby two planes of said ferromagnetic boundary of said layer of ferromagnetic material contain one lengthwise sidewall of each of two lower level conductors that are of shortest length when compared with all other lower level conductors wherein said sidewalls form part of said boundary of said helix coil comprising the additional step of: depositing a layer of dielectric having attributes of said third layer of dielectric over said lower level conductors said step of depositing a layer of dielectric replacing said step of depositing a third layer of intra-metal dielectric whereby said additional steps are followed by said step of patterning and etching third layer of intra-metal dielectric; patterning and etching said layer of dielectric in accordance with said ferromagnetic pattern; depositing a layer of ferromagnetic material having a surface over a surface of said layer of dielectric; and polishing said layer of ferromagnetic material down to the surface of said layer of dielectric thereby leaving a layer of ferromagnetic material in place overlying said lower level horizontal conductors. 